EFFECT OF SOL CONCENTRATION AND SUBSTRATE TYPE ON MICROSTRUCTURE FORMATION OF PZT THIN FILMS
Pb(Zr0.52Ti0.48)O3 (PZT) sols were prepared by a modified sol-gel route using both solvents - acetic acid and stabilizer solution (n-propanol : 1,2-propanediol in the rate 10 : 1). The sols were deposited by spin-coating onto platinized Al2O3 or SiO2/Si substrates. Results of SEM and XRD analyses co...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
University of Chemistry and Technology, Prague
2011-03-01
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Series: | Ceramics-Silikáty |
Subjects: | |
Online Access: | http://www.ceramics-silikaty.cz/2011/pdf/2011_01_36.pdf |