EFFECT OF SOL CONCENTRATION AND SUBSTRATE TYPE ON MICROSTRUCTURE FORMATION OF PZT THIN FILMS

Pb(Zr0.52Ti0.48)O3 (PZT) sols were prepared by a modified sol-gel route using both solvents - acetic acid and stabilizer solution (n-propanol : 1,2-propanediol in the rate 10 : 1). The sols were deposited by spin-coating onto platinized Al2O3 or SiO2/Si substrates. Results of SEM and XRD analyses co...

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Bibliographic Details
Main Authors: ĽUBOMÍR MEDVECKÝ, HELENA BRUNCKOVÁ
Format: Article
Language:English
Published: University of Chemistry and Technology, Prague 2011-03-01
Series:Ceramics-Silikáty
Subjects:
Online Access:http://www.ceramics-silikaty.cz/2011/pdf/2011_01_36.pdf