Comparison of Sb<sub>2</sub>O<sub>3</sub> and Sb<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> Double Stacked pH Sensing Membrane Applied in Electrolyte-Insulator-Semiconductor Structure

Comparison of Sb<sub>2</sub>O<sub>3</sub> and Sb<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> Double Stacked pH Sensing Membrane Applied in Electrolyte-Insulator-Semiconductor Structure

In this study, electrolyte-insulator-semiconductor (EIS) capacitors with Sb<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> double stacked sensing membranes were fabricated with pH sensing capability. The results indicate that Sb<sub>2</sub>O<sub>3</...

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Bibliographic Details
Main Authors: Chyuan-Haur Kao, Kuan-Lin Chen, Hui-Ru Wu, Yu-Chin Cheng, Cheng-Shan Chen, Shih-Ming Chen, Ming-Ling Lee, Hsiang Chen
Format: Article
Language:English
Published: MDPI AG 2022-07-01
Series:Membranes
Subjects:
Sb<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> double stack
pH sensing
silicate
crystallization
reiability
Online Access:https://www.mdpi.com/2077-0375/12/8/734

Internet

https://www.mdpi.com/2077-0375/12/8/734

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