Comparison of Sb<sub>2</sub>O<sub>3</sub> and Sb<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> Double Stacked pH Sensing Membrane Applied in Electrolyte-Insulator-Semiconductor Structure
In this study, electrolyte-insulator-semiconductor (EIS) capacitors with Sb<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> double stacked sensing membranes were fabricated with pH sensing capability. The results indicate that Sb<sub>2</sub>O<sub>3</...
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-07-01
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| Series: | Membranes |
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| Online Access: | https://www.mdpi.com/2077-0375/12/8/734 |
| _version_ | 1797443575685840896 |
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| author | Chyuan-Haur Kao Kuan-Lin Chen Hui-Ru Wu Yu-Chin Cheng Cheng-Shan Chen Shih-Ming Chen Ming-Ling Lee Hsiang Chen |
| author_facet | Chyuan-Haur Kao Kuan-Lin Chen Hui-Ru Wu Yu-Chin Cheng Cheng-Shan Chen Shih-Ming Chen Ming-Ling Lee Hsiang Chen |
| author_sort | Chyuan-Haur Kao |
| collection | DOAJ |
| description | In this study, electrolyte-insulator-semiconductor (EIS) capacitors with Sb<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> double stacked sensing membranes were fabricated with pH sensing capability. The results indicate that Sb<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> double stacked membranes with appropriate annealing had better material quality and sensing performance than Sb<sub>2</sub>O<sub>3</sub> membranes did. To investigate the influence of double stack and annealing, multiple material characterizations and sensing measurements on membranes including of X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and scanning electron microscopy (SEM) were conducted. These analyses indicate that double stack could enhance crystallization and grainization, which reinforced the surface sites on the membrane. Therefore, the sensing capability could be enhanced, Sb<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub>-based with appropriate annealing show promises for future industrial ion sensing devices. |
| first_indexed | 2024-03-09T12:59:01Z |
| format | Article |
| id | doaj.art-9c96dcf20afe468daac4ec36d2a90245 |
| institution | Directory Open Access Journal |
| issn | 2077-0375 |
| language | English |
| last_indexed | 2024-03-09T12:59:01Z |
| publishDate | 2022-07-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Membranes |
| spelling | doaj.art-9c96dcf20afe468daac4ec36d2a902452023-11-30T21:57:15ZengMDPI AGMembranes2077-03752022-07-0112873410.3390/membranes12080734Comparison of Sb<sub>2</sub>O<sub>3</sub> and Sb<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> Double Stacked pH Sensing Membrane Applied in Electrolyte-Insulator-Semiconductor StructureChyuan-Haur Kao0Kuan-Lin Chen1Hui-Ru Wu2Yu-Chin Cheng3Cheng-Shan Chen4Shih-Ming Chen5Ming-Ling Lee6Hsiang Chen7Department of Electronic Engineering, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan, Taoyuan 333, TaiwanDepartment of Electronic Engineering, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan, Taoyuan 333, TaiwanDepartment of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Puli 545, TaiwanDepartment of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Puli 545, TaiwanDepartment of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Puli 545, TaiwanDepartment of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Puli 545, TaiwanDepartment of Electro-Optical Engineering, Minghsin University of Science and Technology, No.1, Xinxing Rd., Xinfeng, Hsinchu 304, TaiwanDepartment of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Puli 545, TaiwanIn this study, electrolyte-insulator-semiconductor (EIS) capacitors with Sb<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> double stacked sensing membranes were fabricated with pH sensing capability. The results indicate that Sb<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> double stacked membranes with appropriate annealing had better material quality and sensing performance than Sb<sub>2</sub>O<sub>3</sub> membranes did. To investigate the influence of double stack and annealing, multiple material characterizations and sensing measurements on membranes including of X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and scanning electron microscopy (SEM) were conducted. These analyses indicate that double stack could enhance crystallization and grainization, which reinforced the surface sites on the membrane. Therefore, the sensing capability could be enhanced, Sb<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub>-based with appropriate annealing show promises for future industrial ion sensing devices.https://www.mdpi.com/2077-0375/12/8/734Sb<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> double stackpH sensingsilicatecrystallizationreiability |
| spellingShingle | Chyuan-Haur Kao Kuan-Lin Chen Hui-Ru Wu Yu-Chin Cheng Cheng-Shan Chen Shih-Ming Chen Ming-Ling Lee Hsiang Chen Comparison of Sb<sub>2</sub>O<sub>3</sub> and Sb<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> Double Stacked pH Sensing Membrane Applied in Electrolyte-Insulator-Semiconductor Structure Membranes Sb<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> double stack pH sensing silicate crystallization reiability |
| title | Comparison of Sb<sub>2</sub>O<sub>3</sub> and Sb<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> Double Stacked pH Sensing Membrane Applied in Electrolyte-Insulator-Semiconductor Structure |
| title_full | Comparison of Sb<sub>2</sub>O<sub>3</sub> and Sb<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> Double Stacked pH Sensing Membrane Applied in Electrolyte-Insulator-Semiconductor Structure |
| title_fullStr | Comparison of Sb<sub>2</sub>O<sub>3</sub> and Sb<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> Double Stacked pH Sensing Membrane Applied in Electrolyte-Insulator-Semiconductor Structure |
| title_full_unstemmed | Comparison of Sb<sub>2</sub>O<sub>3</sub> and Sb<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> Double Stacked pH Sensing Membrane Applied in Electrolyte-Insulator-Semiconductor Structure |
| title_short | Comparison of Sb<sub>2</sub>O<sub>3</sub> and Sb<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> Double Stacked pH Sensing Membrane Applied in Electrolyte-Insulator-Semiconductor Structure |
| title_sort | comparison of sb sub 2 sub o sub 3 sub and sb sub 2 sub o sub 3 sub sio sub 2 sub double stacked ph sensing membrane applied in electrolyte insulator semiconductor structure |
| topic | Sb<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> double stack pH sensing silicate crystallization reiability |
| url | https://www.mdpi.com/2077-0375/12/8/734 |
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