Excimer-ultraviolet-lamp-assisted selective etching of single-layer graphene and its application in edge-contact devices

Excimer-ultraviolet-lamp-assisted selective etching of single-layer graphene and its application in edge-contact devices

Abstract Since the discovery of graphene and its remarkable properties, researchers have actively explored advanced graphene-patterning technologies. While the etching process is pivotal in shaping graphene channels, existing etching techniques have limitations such as low speed, high cost, residue...

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Bibliographic Details
Main Authors: Minjeong Shin, Jin Hong Kim, Jin-Yong Ko, Mohd Musaib Haidari, Dong Jin Jang, Kihyun Lee, Kwanpyo Kim, Hakseong Kim, Bae Ho Park, Jin Sik Choi
Format: Article
Language:English
Published: SpringerOpen 2024-08-01
Series:Nano Convergence
Subjects:
Selective etching
Photochemical etching
Excimer UV
Single-layer graphene
Edge contact
Online Access:https://doi.org/10.1186/s40580-024-00442-5

Internet

https://doi.org/10.1186/s40580-024-00442-5

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