Bimorph Dual-Electrode ScAlN PMUT with Two Terminal Connections

Bimorph Dual-Electrode ScAlN PMUT with Two Terminal Connections

This paper presents a novel bimorph Piezoelectric Micromachined Ultrasonic Transducer (PMUT) fabricated with 8-inch standard CMOS-compatible processes. The bimorph structure consists of two layers of 20% scandium-doped aluminum nitride (Sc<sub>0.2</sub>Al<sub>0.8</sub>N) thin...

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Bibliographic Details
Main Authors: Meilin Ji, Haolin Yang, Yongxin Zhou, Xueying Xiu, Haochen Lv, Songsong Zhang
Format: Article
Language:English
Published: MDPI AG 2022-12-01
Series:Micromachines
Subjects:
scandium-doped aluminum nitride (Sc<sub>0.2</sub>Al<sub>0.8</sub>N)
bimorph
dual-electrode
PMUT
Online Access:https://www.mdpi.com/2072-666X/13/12/2260

Internet

https://www.mdpi.com/2072-666X/13/12/2260

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