Evolution of microstructure and related optical properties of ZnO grown by atomic layer deposition

Evolution of microstructure and related optical properties of ZnO grown by atomic layer deposition

A study of transmittance and photoluminescence spectra on the growth of oxygen-rich ultra-thin ZnO films prepared by atomic layer deposition is reported. The structural transition from an amorphous to a polycrystalline state is observed upon increasing the thickness. The unusual behavior of the ener...

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Bibliographic Details
Main Authors: Adib Abou Chaaya, Roman Viter, Mikhael Bechelany, Zanda Alute, Donats Erts, Anastasiya Zalesskaya, Kristaps Kovalevskis, Vincent Rouessac, Valentyn Smyntyna, Philippe Miele
Format: Article
Language:English
Published: Beilstein-Institut 2013-10-01
Series:Beilstein Journal of Nanotechnology
Subjects:
atomic layer deposition
optical properties
photoluminescence
thin films
ZnO
Online Access:https://doi.org/10.3762/bjnano.4.78

Internet

https://doi.org/10.3762/bjnano.4.78

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