A dispatching method for the lots of different priorities in 450-mm semiconductor manufacturing
Semiconductor industry grows rapidly in recent years. It has an impact on the economies all over the world. For the mass production requirement, the wafer size starts to be increased from 300 to 450 mm. The technician cannot handle a large number of wafers since the size and weight of the wafers are...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2017-07-01
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| Series: | Advances in Mechanical Engineering |
| Online Access: | https://doi.org/10.1177/1687814017713945 |