RESEARCH OF STRUCTURE AND COMPOSITION OF FILMS SOLID SOLUTION (SIC)1-X (ALN)X, RECEIVED BY METHOD MAGNETRON DEPOSITION
Method of magnetron sputtering targets polycrystalline SiC-AlN on substrates SiC and Al2O3 thin films received solid solutions (SiC)1-x(AlN)x. The methods of Xray and electron microscopy studies the structure and composition of films. There are factors that determine the composition and structure of...
| Main Authors: | , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
Dagestan State Technical University
2016-07-01
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| Series: | Вестник Дагестанского государственного технического университета: Технические науки |
| Subjects: | |
| Online Access: | https://vestnik.dgtu.ru/jour/article/view/198 |