Failure analysis on silicon semiconductor device materials: optical and high-resolution microscopic assessments

Failure analysis on silicon semiconductor device materials: optical and high-resolution microscopic assessments

Defects of silicon (Si) semiconductor epilayers are crucial to be identified at laboratory environs. The identification of failure and its rectification at laboratory settings is essential for large-scaling manufacturing of narrowed down semiconductor devices. This research documented the inspection...

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Bibliographic Details
Main Authors: Subash C.B. Gopinath, Santheraleka Ramanathan, Mohd Najib Mohd Yasin, Mohd Ibrahim Shapiai Razak, Zool Hilmi Ismail, Syahrizal Salleh, Zaliman Sauli, M.B. Malarvili, Sreeramanan Subramaniam
Format: Article
Language:English
Published: Elsevier 2022-11-01
Series:Journal of Materials Research and Technology
Subjects:
Silicon semiconductor
Morphology inspection
Photolithography
Failure analysis
Online Access:http://www.sciencedirect.com/science/article/pii/S2238785422016544

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http://www.sciencedirect.com/science/article/pii/S2238785422016544

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