Area-Selective Growth of Zinc Oxide Nanowire Arrays for Piezoelectric Energy Harvesting

Area-Selective Growth of Zinc Oxide Nanowire Arrays for Piezoelectric Energy Harvesting

In this work, we present the area-selective growth of zinc oxide nanowire (NW) arrays on patterned surfaces of a silicon (Si) substrate for a piezoelectric nanogenerator (PENG). ZnO NW arrays were selectively grown on patterned surfaces of a Si substrate using a devised microelectromechanical system...

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Bibliographic Details
Main Authors: Frank Eric Boye Anang, Xuanwei Wei, Jiushuai Xu, Markys Cain, Zhi Li, Uwe Brand, Erwin Peiner
Format: Article
Language:English
Published: MDPI AG 2024-02-01
Series:Micromachines
Subjects:
area-selective growth
ZnO nanowire arrays
MEMS
CBD growth
SU-8 polymer
PENG
Online Access:https://www.mdpi.com/2072-666X/15/2/261

Internet

https://www.mdpi.com/2072-666X/15/2/261

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