Area-Selective Growth of Zinc Oxide Nanowire Arrays for Piezoelectric Energy Harvesting
In this work, we present the area-selective growth of zinc oxide nanowire (NW) arrays on patterned surfaces of a silicon (Si) substrate for a piezoelectric nanogenerator (PENG). ZnO NW arrays were selectively grown on patterned surfaces of a Si substrate using a devised microelectromechanical system...
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MDPI AG
2024-02-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/15/2/261 |
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| author | Frank Eric Boye Anang Xuanwei Wei Jiushuai Xu Markys Cain Zhi Li Uwe Brand Erwin Peiner |
| author_facet | Frank Eric Boye Anang Xuanwei Wei Jiushuai Xu Markys Cain Zhi Li Uwe Brand Erwin Peiner |
| author_sort | Frank Eric Boye Anang |
| collection | DOAJ |
| description | In this work, we present the area-selective growth of zinc oxide nanowire (NW) arrays on patterned surfaces of a silicon (Si) substrate for a piezoelectric nanogenerator (PENG). ZnO NW arrays were selectively grown on patterned surfaces of a Si substrate using a devised microelectromechanical system (MEMS)-compatible chemical bath deposition (CBD) method. The fabricated devices measured a maximum peak output voltage of ~7.9 mV when a mass of 91.5 g was repeatedly manually placed on them. Finite element modeling (FEM) of a single NW using COMSOL Multiphysics at an applied axial force of 0.9 nN, which corresponded to the experimental condition, resulted in a voltage potential of −6.5 mV. The process repeated with the same pattern design using a layer of SU-8 polymer on the NWs yielded a much higher maximum peak output voltage of ~21.6 mV and a corresponding peak power density of 0.22 µW/cm<sup>3</sup>, independent of the size of the NW array. The mean values of the measured output voltage and FEM showed good agreement and a nearly linear dependence on the applied force on a 3 × 3 µm<sup>2</sup> NW array area in the range of 20 to 90 nN. |
| first_indexed | 2024-03-07T22:21:06Z |
| format | Article |
| id | doaj.art-9e3a00fbf7424eefa9080d6574360025 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-07T22:21:06Z |
| publishDate | 2024-02-01 |
| publisher | MDPI AG |
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| series | Micromachines |
| spelling | doaj.art-9e3a00fbf7424eefa9080d65743600252024-02-23T15:27:49ZengMDPI AGMicromachines2072-666X2024-02-0115226110.3390/mi15020261Area-Selective Growth of Zinc Oxide Nanowire Arrays for Piezoelectric Energy HarvestingFrank Eric Boye Anang0Xuanwei Wei1Jiushuai Xu2Markys Cain3Zhi Li4Uwe Brand5Erwin Peiner6Institute of Semiconductor Technology, TU Braunschweig, 38104 Braunschweig, GermanyInstitute of Semiconductor Technology, TU Braunschweig, 38104 Braunschweig, GermanyInstitute of Semiconductor Technology, TU Braunschweig, 38104 Braunschweig, GermanyElectrosciences Ltd., Farnham, Surrey GU9 9QT, UKSurface Metrology Department, Physikalisch-Technische Bundesanstalt (PTB), 38116 Braunschweig, GermanySurface Metrology Department, Physikalisch-Technische Bundesanstalt (PTB), 38116 Braunschweig, GermanyInstitute of Semiconductor Technology, TU Braunschweig, 38104 Braunschweig, GermanyIn this work, we present the area-selective growth of zinc oxide nanowire (NW) arrays on patterned surfaces of a silicon (Si) substrate for a piezoelectric nanogenerator (PENG). ZnO NW arrays were selectively grown on patterned surfaces of a Si substrate using a devised microelectromechanical system (MEMS)-compatible chemical bath deposition (CBD) method. The fabricated devices measured a maximum peak output voltage of ~7.9 mV when a mass of 91.5 g was repeatedly manually placed on them. Finite element modeling (FEM) of a single NW using COMSOL Multiphysics at an applied axial force of 0.9 nN, which corresponded to the experimental condition, resulted in a voltage potential of −6.5 mV. The process repeated with the same pattern design using a layer of SU-8 polymer on the NWs yielded a much higher maximum peak output voltage of ~21.6 mV and a corresponding peak power density of 0.22 µW/cm<sup>3</sup>, independent of the size of the NW array. The mean values of the measured output voltage and FEM showed good agreement and a nearly linear dependence on the applied force on a 3 × 3 µm<sup>2</sup> NW array area in the range of 20 to 90 nN.https://www.mdpi.com/2072-666X/15/2/261area-selective growthZnO nanowire arraysMEMSCBD growthSU-8 polymerPENG |
| spellingShingle | Frank Eric Boye Anang Xuanwei Wei Jiushuai Xu Markys Cain Zhi Li Uwe Brand Erwin Peiner Area-Selective Growth of Zinc Oxide Nanowire Arrays for Piezoelectric Energy Harvesting Micromachines area-selective growth ZnO nanowire arrays MEMS CBD growth SU-8 polymer PENG |
| title | Area-Selective Growth of Zinc Oxide Nanowire Arrays for Piezoelectric Energy Harvesting |
| title_full | Area-Selective Growth of Zinc Oxide Nanowire Arrays for Piezoelectric Energy Harvesting |
| title_fullStr | Area-Selective Growth of Zinc Oxide Nanowire Arrays for Piezoelectric Energy Harvesting |
| title_full_unstemmed | Area-Selective Growth of Zinc Oxide Nanowire Arrays for Piezoelectric Energy Harvesting |
| title_short | Area-Selective Growth of Zinc Oxide Nanowire Arrays for Piezoelectric Energy Harvesting |
| title_sort | area selective growth of zinc oxide nanowire arrays for piezoelectric energy harvesting |
| topic | area-selective growth ZnO nanowire arrays MEMS CBD growth SU-8 polymer PENG |
| url | https://www.mdpi.com/2072-666X/15/2/261 |
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