Effect of annealing on humidity sensing properties of Sm-doped SnO2 thin films
Samarium doped tin oxide (Sm-doped SnO2) nanoparticles were sputter deposited on a Silicon substrate to investigate the effect of dopant on humidity sensing properties of tin oxide thin films. Post deposition treatment was done to improve the surface roughness for more reaction sites to be formed. T...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
Elsevier
2019-11-01
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Series: | Journal of Materials Research and Technology |
Online Access: | http://www.sciencedirect.com/science/article/pii/S2238785419300250 |