Effect of annealing on humidity sensing properties of Sm-doped SnO2 thin films

Samarium doped tin oxide (Sm-doped SnO2) nanoparticles were sputter deposited on a Silicon substrate to investigate the effect of dopant on humidity sensing properties of tin oxide thin films. Post deposition treatment was done to improve the surface roughness for more reaction sites to be formed. T...

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Bibliographic Details
Main Authors: R Bakiya Lakshmi, A Vimala Juliet
Format: Article
Language:English
Published: Elsevier 2019-11-01
Series:Journal of Materials Research and Technology
Online Access:http://www.sciencedirect.com/science/article/pii/S2238785419300250