Organic Vapors Sensor Based on Dangling Bonds of Porous Silicon
In this paper, a porous silicon (PS) layer is investigated as a sensing materialto detect the organic vapors with low concentration. The structure of theprepared sensor consists of thin Au /PS/n-Si/Au thick where the PS is etchedphoto -chemically. The current response of the sensor is governed by th...
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| Format: | Article |
| Language: | English |
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Unviversity of Technology- Iraq
2007-10-01
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| Series: | Engineering and Technology Journal |
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| Online Access: | https://etj.uotechnology.edu.iq/article_25943_ae5163de50aa90e35f823d43a655a1f7.pdf |