Effects of fabrication errors on the focusing performance of a sector metalens
Using e-beam lithography, a 16-sector spiral metalens was fabricated in an amorphous silicon, capable of converting linearly polarized incident light into an azimuthally polarized optical vortex. When illuminated by a 633-nm linearly polarized laser beam, the metalens generated a near-surface subwav...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Samara National Research University
2018-12-01
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| Series: | Компьютерная оптика |
| Subjects: | |
| Online Access: | http://computeroptics.ru/KO/PDF/KO42-6/420605.pdf |