Influence of the Ion Treatment Regime on Defects Density and Surface Destruction of the Polycrystalline Glass

<p>The ion beam technology is used for finish treatment of large-scale optic parts to achieve highest precision and minimal surface roughness. The surface roughness increases during the ion treatment of polycrystalline materials in contrast to usual optic materials. This is caused, first, by p...

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Bibliographic Details
Main Authors: D. V. Duhopel'nikov, S. G. Ivakhnenko, E. V. Vorob'ev, A. A. Azerbaev
Format: Article
Language:Russian
Published: MGTU im. N.È. Baumana 2014-01-01
Series:Nauka i Obrazovanie
Subjects:
Online Access:http://technomag.edu.ru/jour/article/view/824