MEMS Device for Quantitative In Situ Mechanical Testing in Electron Microscope

MEMS Device for Quantitative In Situ Mechanical Testing in Electron Microscope

In this work, we designed a micro-electromechanical systems (MEMS) device that allows simultaneous direct measurement of mechanical properties during deformation under external stress and characterization of the evolution of nanomaterial microstructure within a transmission electron microscope. This...

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Bibliographic Details
Main Authors: Xiaodong Wang, Shengcheng Mao, Jianfei Zhang, Zhipeng Li, Qingsong Deng, Jin Ning, Xudong Yang, Li Wang, Yuan Ji, Xiaochen Li, Yinong Liu, Ze Zhang, Xiaodong Han
Format: Article
Language:English
Published: MDPI AG 2017-01-01
Series:Micromachines
Subjects:
piezoresistive sensor
electron microscope
in situ mechanical test
Online Access:http://www.mdpi.com/2072-666X/8/2/31

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http://www.mdpi.com/2072-666X/8/2/31

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