Single-Capacitor Electret Impact Microgenerator
A new type of electrostatic microgenerator is presented that converts mechanical microvibrational energy into electric energy. The energy conversion mechanism is as follows. External microvibrations are transmitted to the device frame. The thin electret layer sputtered to the silicon substrate surfa...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2016-01-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/7/1/5 |