Numerical modeling of the electrical properties plasma argon in a RF magnetron sputtering and with Einstein's relation of electron diffusivity
Numerical modeling of RF magnetron sputtering discharge of argon plasma properties, using a one-dimensional time-dependent fluid model in presence of the magnetic field, has been developed. The model is based on continuity equation and electron temperature equation coupled with Poisson’s equation. T...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2020-01-01
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| Series: | Journal of King Saud University: Science |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S1018364718305652 |