Broadband Zero-Power Wakeup MEMS Device for Energy-Efficient Sensor Nodes

A zero-power wakeup scheme for energy-efficient sensor applications is presented in this study based on a piezoelectric MEMS energy harvester featuring wafer-level-integrated micromagnets. The proposed setup overcomes a hybrid assembly of magnets on a chip-level, a major drawback of similar existing...

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Bibliographic Details
Main Authors: Minhaz Ahmed, Torben Dankwort, Sven Grünzig, Volker Lange, Björn Gojdka
Format: Article
Language:English
Published: MDPI AG 2022-03-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/13/3/407