The role of arsenic in the operation of sulfur-based electrical threshold switches
Abstract Arsenic is an essential dopant in conventional silicon-based semiconductors and emerging phase-change memory (PCM), yet the detailed functional mechanism is still lacking in the latter. Here, we fabricate chalcogenide-based ovonic threshold switching (OTS) selectors, which are key units for...
Main Authors: | , , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Nature Portfolio
2023-09-01
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Series: | Nature Communications |
Online Access: | https://doi.org/10.1038/s41467-023-41643-6 |