Capacitive Pressure Sensor With Integrated Signal-Conversion Circuit for High-Temperature Applications
In this paper, a capacitive pressure sensor for high-temperature application is proposed. This sensor includes three parts: a capacitive pressure-sensitive chip fabricated from green tapes using lamination technology, a C-V conversion circuit fabricated using high-temperature-resistant electronic co...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2020-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9210055/ |