Capacitive Pressure Sensor With Integrated Signal-Conversion Circuit for High-Temperature Applications
In this paper, a capacitive pressure sensor for high-temperature application is proposed. This sensor includes three parts: a capacitive pressure-sensitive chip fabricated from green tapes using lamination technology, a C-V conversion circuit fabricated using high-temperature-resistant electronic co...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IEEE
2020-01-01
|
| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9210055/ |
| _version_ | 1830090022906232832 |
|---|---|
| author | Chen Li Boshan Sun Pengyu Jia Yanan Xue Mangu Jia Jijun Xiong |
| author_facet | Chen Li Boshan Sun Pengyu Jia Yanan Xue Mangu Jia Jijun Xiong |
| author_sort | Chen Li |
| collection | DOAJ |
| description | In this paper, a capacitive pressure sensor for high-temperature application is proposed. This sensor includes three parts: a capacitive pressure-sensitive chip fabricated from green tapes using lamination technology, a C-V conversion circuit fabricated using high-temperature-resistant electronic components and a PCB board, and a thermal-insulation shell fabricated from a high-temperature-resistant alloy and aerogel. Due to the aerogel, which is a thermal-insulation material, being filled between the circuit board and the rear-end shell, when the air intake temperature reaches 350°C, the temperature transmitted to the C-V conversion circuit board can be kept below 60°C; this ensures normal operation of the C-V converter circuit. The developed sensor can record pressure values from room temperature to 350 °C. According to the pressure-voltage curves at different temperatures obtained from tests, the sensor's sensitivity is 38 mV/bar, and its repeatability error is less than 1.948%. The results show that the proposed sensor has a high operating temperature and is more reliable and linear than existing sensors. |
| first_indexed | 2024-12-16T16:55:29Z |
| format | Article |
| id | doaj.art-9ef3c2cacd734a0e83a5ebec1b6bb228 |
| institution | Directory Open Access Journal |
| issn | 2169-3536 |
| language | English |
| last_indexed | 2024-12-16T16:55:29Z |
| publishDate | 2020-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Access |
| spelling | doaj.art-9ef3c2cacd734a0e83a5ebec1b6bb2282022-12-21T22:23:53ZengIEEEIEEE Access2169-35362020-01-01821278721279310.1109/ACCESS.2020.30279519210055Capacitive Pressure Sensor With Integrated Signal-Conversion Circuit for High-Temperature ApplicationsChen Li0Boshan Sun1https://orcid.org/0000-0001-6650-6301Pengyu Jia2Yanan Xue3Mangu Jia4Jijun Xiong5https://orcid.org/0000-0003-1560-9858Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan, ChinaScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan, ChinaScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan, ChinaScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan, ChinaKey Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, ChinaScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan, ChinaIn this paper, a capacitive pressure sensor for high-temperature application is proposed. This sensor includes three parts: a capacitive pressure-sensitive chip fabricated from green tapes using lamination technology, a C-V conversion circuit fabricated using high-temperature-resistant electronic components and a PCB board, and a thermal-insulation shell fabricated from a high-temperature-resistant alloy and aerogel. Due to the aerogel, which is a thermal-insulation material, being filled between the circuit board and the rear-end shell, when the air intake temperature reaches 350°C, the temperature transmitted to the C-V conversion circuit board can be kept below 60°C; this ensures normal operation of the C-V converter circuit. The developed sensor can record pressure values from room temperature to 350 °C. According to the pressure-voltage curves at different temperatures obtained from tests, the sensor's sensitivity is 38 mV/bar, and its repeatability error is less than 1.948%. The results show that the proposed sensor has a high operating temperature and is more reliable and linear than existing sensors.https://ieeexplore.ieee.org/document/9210055/Capacitive pressure sensorceramic sensitive chipthermal insulationhigh temperature environment application |
| spellingShingle | Chen Li Boshan Sun Pengyu Jia Yanan Xue Mangu Jia Jijun Xiong Capacitive Pressure Sensor With Integrated Signal-Conversion Circuit for High-Temperature Applications IEEE Access Capacitive pressure sensor ceramic sensitive chip thermal insulation high temperature environment application |
| title | Capacitive Pressure Sensor With Integrated Signal-Conversion Circuit for High-Temperature Applications |
| title_full | Capacitive Pressure Sensor With Integrated Signal-Conversion Circuit for High-Temperature Applications |
| title_fullStr | Capacitive Pressure Sensor With Integrated Signal-Conversion Circuit for High-Temperature Applications |
| title_full_unstemmed | Capacitive Pressure Sensor With Integrated Signal-Conversion Circuit for High-Temperature Applications |
| title_short | Capacitive Pressure Sensor With Integrated Signal-Conversion Circuit for High-Temperature Applications |
| title_sort | capacitive pressure sensor with integrated signal conversion circuit for high temperature applications |
| topic | Capacitive pressure sensor ceramic sensitive chip thermal insulation high temperature environment application |
| url | https://ieeexplore.ieee.org/document/9210055/ |
| work_keys_str_mv | AT chenli capacitivepressuresensorwithintegratedsignalconversioncircuitforhightemperatureapplications AT boshansun capacitivepressuresensorwithintegratedsignalconversioncircuitforhightemperatureapplications AT pengyujia capacitivepressuresensorwithintegratedsignalconversioncircuitforhightemperatureapplications AT yananxue capacitivepressuresensorwithintegratedsignalconversioncircuitforhightemperatureapplications AT mangujia capacitivepressuresensorwithintegratedsignalconversioncircuitforhightemperatureapplications AT jijunxiong capacitivepressuresensorwithintegratedsignalconversioncircuitforhightemperatureapplications |