Optimization of anodized aluminum oxide pore morphology for GaAs nanowire growth

Anodic Aluminum oxide films were produced by anodization of sputtered Aluminum thin films on Silicon substrates. The effects of anodization voltage and aqueous oxalic acid solution on the pore diameter and interpore distance were studied. Parameters were sequentially varied to optimize the pore unif...

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Bibliographic Details
Main Authors: Regine A. Loberternos, Oliver D. Semblante, Rogelio G. Dizon, Claude R. Ceniza, Jasher John A. Ibanes, Arnel A. Salvador, Armando S. Somintac
Format: Article
Language:English
Published: University of the Philippines 2010-06-01
Series:Science Diliman
Subjects:
Online Access:http://journals.upd.edu.ph/index.php/sciencediliman/article/view/1569/1989