Optimization of anodized aluminum oxide pore morphology for GaAs nanowire growth
Anodic Aluminum oxide films were produced by anodization of sputtered Aluminum thin films on Silicon substrates. The effects of anodization voltage and aqueous oxalic acid solution on the pore diameter and interpore distance were studied. Parameters were sequentially varied to optimize the pore unif...
Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
University of the Philippines
2010-06-01
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Series: | Science Diliman |
Subjects: | |
Online Access: | http://journals.upd.edu.ph/index.php/sciencediliman/article/view/1569/1989 |