Direct laser writing of 3D electrodes on flexible substrates

Direct laser writing of 3D electrodes on flexible substrates

Abstract This report describes a 3D microelectrode array integrated on a thin-film flexible cable for neural recording in small animals. The fabrication process combines traditional silicon thin-film processing techniques and direct laser writing of 3D structures at micron resolution via two-photon...

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Bibliographic Details
Main Authors: Morgan A. Brown, Kara M. Zappitelli, Loveprit Singh, Rachel C. Yuan, Melissa Bemrose, Valerie Brogden, David J. Miller, Matthew C. Smear, Stuart F. Cogan, Timothy J. Gardner
Format: Article
Language:English
Published: Nature Portfolio 2023-06-01
Series:Nature Communications
Online Access:https://doi.org/10.1038/s41467-023-39152-7

Internet

https://doi.org/10.1038/s41467-023-39152-7

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