Investigation of Factors Affecting Sensitivity Enhancement of an Optical Fiber Probe for Microstructure Measurement Using Oblique Incident Light
Recently, the demand for accuracy measurement of microstructures has been remarkable. We have been developing a measurement system for microstructures using a stylus made of an optical fiber and prisms. In this measurement system, the oblique irradiation of the laser beam was employed to detect the...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-05-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/10/9/3191 |