The improvement of CoZrTaB thin films on different substrates for flexible device applications
In this paper, the CoZrTaB thin films are fabricated using sputtering on different substrates and characterized comprehensively. The CoZrTaB thin films have been fabricated in the single-layer and multi-layer structures with SiO2 as the insulator layer, of which the vibrating sample magnetometer res...
Main Authors: | , , |
---|---|
Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2021-02-01
|
Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/9.0000238 |