Low-energy electron beam and its application
Low-energy electron beam is an advanced technology that is widely used for manufacturing various high-tech products in the United States, Japan and developed countries in Europe since the 1980s. Owing to the high price of imported electron beam equipment and related processes and raw materials, the...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | zho |
| Published: |
Science Press
2022-04-01
|
| Series: | Fushe yanjiu yu fushe gongyi xuebao |
| Subjects: | |
| Online Access: | http://www.fs.sinap.ac.cn/thesisDetails#10.11889/j.1000-3436.2022-0017&lang=zh |