3D nanopolymerization and damage threshold dependence on laser wavelength and pulse duration

The dependence of the polymerization and optical damage thresholds in multi-photon polymerization (MPP) lithography was studied using a broadly-tunable laser system with group delay dispersion (GDD) control. The order of non-linearity and the light–matter interaction mechanisms were investigated usi...

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Bibliographic Details
Main Authors: Samsonas Danielius, Skliutas Edvinas, Čiburys Arūnas, Kontenis Lukas, Gailevičius Darius, Berzinš Jonas, Narbutis Donatas, Jukna Vytautas, Vengris Mikas, Juodkazis Saulius, Malinauskas Mangirdas
Format: Article
Language:English
Published: De Gruyter 2023-01-01
Series:Nanophotonics
Subjects:
Online Access:https://doi.org/10.1515/nanoph-2022-0629