3D nanopolymerization and damage threshold dependence on laser wavelength and pulse duration
The dependence of the polymerization and optical damage thresholds in multi-photon polymerization (MPP) lithography was studied using a broadly-tunable laser system with group delay dispersion (GDD) control. The order of non-linearity and the light–matter interaction mechanisms were investigated usi...
Main Authors: | , , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
De Gruyter
2023-01-01
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Series: | Nanophotonics |
Subjects: | |
Online Access: | https://doi.org/10.1515/nanoph-2022-0629 |