Development and Research of the Sensitive Element of the MEMS Gyroscope Manufactured Using SOI Technology

Development and Research of the Sensitive Element of the MEMS Gyroscope Manufactured Using SOI Technology

In this article, based on the developed methodology, the stages of designing the sensitive element of a microelectromechanical gyroscope with an open-loop structure are considered. This structure is intended for use in control units for mobile objects such as robots, mobile trolleys, etc. To quickly...

Full description

Bibliographic Details
Main Authors: Danil Naumenko, Alexey Tkachenko, Igor Lysenko, Andrey Kovalev
Format: Article
Language:English
Published: MDPI AG 2023-04-01
Series:Micromachines
Subjects:
micromechanical systems
MEMS
gyroscope
sensitive element
drive mode
sensitive mode
Online Access:https://www.mdpi.com/2072-666X/14/4/895

Internet

https://www.mdpi.com/2072-666X/14/4/895

Similar Items