Piezoresistive Sensitivity, Linearity and Resistance Time Drift of Polysilicon Nanofilms with Different Deposition Temperatures

Our previous research work indicated that highly boron doped polysilicon nanofilms (≤100 nm in thickness) have higher gauge factor (the maximum is ~34 for 80 nm-thick films) and better temperature stability than common polysilicon films (≥ 200nm in thickness) at the same doping levels. Therefore, in...

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Bibliographic Details
Main Authors: Changzhi Shi, Xiaowei Liu, Rongyan Chuai
Format: Article
Language:English
Published: MDPI AG 2009-02-01
Series:Sensors
Subjects:
Online Access:http://www.mdpi.com/1424-8220/9/2/1141/