Monolithic Multi-Sensor Design With Resonator-Based MEMS Structures

Monolithic Multi-Sensor Design With Resonator-Based MEMS Structures

In this paper, we demonstrated a resonator-based MEMS architecture for multi-sensor SOC applications. A newly developed 0.18 μm 1P6M CMOS ASIC/MEMS process was adopted to integrate MEMS sensor and circuits monolithically. By using resonators as the building blocks, multiple MEMS sensors i...

Full description

Bibliographic Details
Main Authors: F. Y. Kuo, C. Y. Lin, P. C. Chuang, C. L. Chien, Y. L. Yeh, Stella K. A. Wen
Format: Article
Language:English
Published: IEEE 2017-01-01
Series:IEEE Journal of the Electron Devices Society
Subjects:
Silicon resonator
CMOS MEMS sensor
single process for multiple sensors
monolithic design
Online Access:https://ieeexplore.ieee.org/document/7851031/

Internet

https://ieeexplore.ieee.org/document/7851031/

Similar Items