Monolithic Multi-Sensor Design With Resonator-Based MEMS Structures

Monolithic Multi-Sensor Design With Resonator-Based MEMS Structures

In this paper, we demonstrated a resonator-based MEMS architecture for multi-sensor SOC applications. A newly developed 0.18 μm 1P6M CMOS ASIC/MEMS process was adopted to integrate MEMS sensor and circuits monolithically. By using resonators as the building blocks, multiple MEMS sensors i...

Full description

Bibliographic Details
Main Authors: F. Y. Kuo, C. Y. Lin, P. C. Chuang, C. L. Chien, Y. L. Yeh, Stella K. A. Wen
Format: Article
Language:English
Published: IEEE 2017-01-01
Series:IEEE Journal of the Electron Devices Society
Subjects:
Silicon resonator
CMOS MEMS sensor
single process for multiple sensors
monolithic design
Online Access:https://ieeexplore.ieee.org/document/7851031/
Description
Summary:In this paper, we demonstrated a resonator-based MEMS architecture for multi-sensor SOC applications. A newly developed 0.18 μm 1P6M CMOS ASIC/MEMS process was adopted to integrate MEMS sensor and circuits monolithically. By using resonators as the building blocks, multiple MEMS sensors including environmental temperature sensor, ambient pressure sensor, accelerometer as well as gyro sensor can be monolithically implemented with the readout circuits by the single standard ASIC/MEMS process without off-fab pre/post processes. The proposed architecture enables compact and innovative sentient-assisted SOC design for the emerging IOT applications.
ISSN:2168-6734

Similar Items