Monolithic Multi-Sensor Design With Resonator-Based MEMS Structures
In this paper, we demonstrated a resonator-based MEMS architecture for multi-sensor SOC applications. A newly developed 0.18 μm 1P6M CMOS ASIC/MEMS process was adopted to integrate MEMS sensor and circuits monolithically. By using resonators as the building blocks, multiple MEMS sensors i...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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IEEE
2017-01-01
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| Series: | IEEE Journal of the Electron Devices Society |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/7851031/ |
| _version_ | 1818411680975028224 |
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| author | F. Y. Kuo C. Y. Lin P. C. Chuang C. L. Chien Y. L. Yeh Stella K. A. Wen |
| author_facet | F. Y. Kuo C. Y. Lin P. C. Chuang C. L. Chien Y. L. Yeh Stella K. A. Wen |
| author_sort | F. Y. Kuo |
| collection | DOAJ |
| description | In this paper, we demonstrated a resonator-based MEMS architecture for multi-sensor SOC applications. A newly developed 0.18 μm 1P6M CMOS ASIC/MEMS process was adopted to integrate MEMS sensor and circuits monolithically. By using resonators as the building blocks, multiple MEMS sensors including environmental temperature sensor, ambient pressure sensor, accelerometer as well as gyro sensor can be monolithically implemented with the readout circuits by the single standard ASIC/MEMS process without off-fab pre/post processes. The proposed architecture enables compact and innovative sentient-assisted SOC design for the emerging IOT applications. |
| first_indexed | 2024-12-14T10:35:16Z |
| format | Article |
| id | doaj.art-a0fc669151134ffd9e3e9c175e44f58d |
| institution | Directory Open Access Journal |
| issn | 2168-6734 |
| language | English |
| last_indexed | 2024-12-14T10:35:16Z |
| publishDate | 2017-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Journal of the Electron Devices Society |
| spelling | doaj.art-a0fc669151134ffd9e3e9c175e44f58d2022-12-21T23:05:58ZengIEEEIEEE Journal of the Electron Devices Society2168-67342017-01-015321421810.1109/JEDS.2017.26668217851031Monolithic Multi-Sensor Design With Resonator-Based MEMS StructuresF. Y. Kuo0https://orcid.org/0000-0001-9014-489XC. Y. Lin1P. C. Chuang2C. L. Chien3Y. L. Yeh4Stella K. A. Wen5Department of Electronics Engineering, National Chiao Tung University, Hsinchu, TaiwanDepartment of Electronics Engineering, National Chiao Tung University, Hsinchu, TaiwanDepartment of Electronics Engineering, National Chiao Tung University, Hsinchu, TaiwanDepartment of Electronics Engineering, National Chiao Tung University, Hsinchu, TaiwanDepartment of Electronics Engineering, National Chiao Tung University, Hsinchu, TaiwanDepartment of Electronics Engineering, National Chiao Tung University, Hsinchu, TaiwanIn this paper, we demonstrated a resonator-based MEMS architecture for multi-sensor SOC applications. A newly developed 0.18 μm 1P6M CMOS ASIC/MEMS process was adopted to integrate MEMS sensor and circuits monolithically. By using resonators as the building blocks, multiple MEMS sensors including environmental temperature sensor, ambient pressure sensor, accelerometer as well as gyro sensor can be monolithically implemented with the readout circuits by the single standard ASIC/MEMS process without off-fab pre/post processes. The proposed architecture enables compact and innovative sentient-assisted SOC design for the emerging IOT applications.https://ieeexplore.ieee.org/document/7851031/Silicon resonatorCMOS MEMS sensorsingle process for multiple sensorsmonolithic design |
| spellingShingle | F. Y. Kuo C. Y. Lin P. C. Chuang C. L. Chien Y. L. Yeh Stella K. A. Wen Monolithic Multi-Sensor Design With Resonator-Based MEMS Structures IEEE Journal of the Electron Devices Society Silicon resonator CMOS MEMS sensor single process for multiple sensors monolithic design |
| title | Monolithic Multi-Sensor Design With Resonator-Based MEMS Structures |
| title_full | Monolithic Multi-Sensor Design With Resonator-Based MEMS Structures |
| title_fullStr | Monolithic Multi-Sensor Design With Resonator-Based MEMS Structures |
| title_full_unstemmed | Monolithic Multi-Sensor Design With Resonator-Based MEMS Structures |
| title_short | Monolithic Multi-Sensor Design With Resonator-Based MEMS Structures |
| title_sort | monolithic multi sensor design with resonator based mems structures |
| topic | Silicon resonator CMOS MEMS sensor single process for multiple sensors monolithic design |
| url | https://ieeexplore.ieee.org/document/7851031/ |
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