A High-Precision Three-Dimensional Probe Array Temperature Sensor

A High-Precision Three-Dimensional Probe Array Temperature Sensor

To meet the need for micro-volume devices for high-precision measurement of temperature, Cu-Constantan (CuNi45) thin films with a novel array structure of thermo-electrodes were designed and fabricated. The thermo-electrodes on the probe-type substrate were deposited by magnetron sputtering technolo...

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Bibliographic Details
Main Authors: Bian Tian, Yifan Xing, Xuefeng Zhang, Zhaojun Liu, Zhongkai Zhang, Jiangjiang Liu, Bingfei Zhang, Qijing Lin, Zhuangde Jiang
Format: Article
Language:English
Published: MDPI AG 2022-08-01
Series:Chemosensors
Subjects:
high-precision
flexible sensor
temperature
Online Access:https://www.mdpi.com/2227-9040/10/8/309

Internet

https://www.mdpi.com/2227-9040/10/8/309

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