A Tapered Aluminium Microelectrode Array for Improvement of Dielectrophoresis-Based Particle Manipulation

A Tapered Aluminium Microelectrode Array for Improvement of Dielectrophoresis-Based Particle Manipulation

In this work, the dielectrophoretic force (FDEP) response of Aluminium Microelectrode Arrays with tapered profile is investigated through experimental measurements and numerical simulations. A standard CMOS processing technique with a step for the formation of a tapered profile resist is implemented...

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Bibliographic Details
Main Authors: Muhamad Ramdzan Buyong, Farhad Larki, Mohd Syafiq Faiz, Azrul Azlan Hamzah, Jumrail Yunas, Burhanuddin Yeop Majlis
Format: Article
Language:English
Published: MDPI AG 2015-05-01
Series:Sensors
Subjects:
dielectrophoresis
taper microelectrode
CMOS
numerical simulation
array
Online Access:http://www.mdpi.com/1424-8220/15/5/10973

Internet

http://www.mdpi.com/1424-8220/15/5/10973

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