Resonant Adaptive MEMS Mirror
A novel MEMS continuous deformable mirror (DM) is presented. The mirror can be integrated into optical systems to compensate for monochromatic and chromatic aberrations. It is comprised of a 1.6 mm circular plate supported by eight evenly spaced flexural springs. Unlike traditional bias actuated DMs...
| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-08-01
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| Series: | Actuators |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-0825/11/8/224 |