Resonant Adaptive MEMS Mirror
A novel MEMS continuous deformable mirror (DM) is presented. The mirror can be integrated into optical systems to compensate for monochromatic and chromatic aberrations. It is comprised of a 1.6 mm circular plate supported by eight evenly spaced flexural springs. Unlike traditional bias actuated DMs...
| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-08-01
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| Series: | Actuators |
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| Online Access: | https://www.mdpi.com/2076-0825/11/8/224 |
| _version_ | 1797411914366582784 |
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| author | Amr Kamel Samed Kocer Lyazzat Mukhangaliyeva Resul Saritas Ahmet Gulsaran Alaa Elhady Mohamed Basha Parsin Hajireza Mustafa Yavuz Eihab Abdel-Rahman |
| author_facet | Amr Kamel Samed Kocer Lyazzat Mukhangaliyeva Resul Saritas Ahmet Gulsaran Alaa Elhady Mohamed Basha Parsin Hajireza Mustafa Yavuz Eihab Abdel-Rahman |
| author_sort | Amr Kamel |
| collection | DOAJ |
| description | A novel MEMS continuous deformable mirror (DM) is presented. The mirror can be integrated into optical systems to compensate for monochromatic and chromatic aberrations. It is comprised of a 1.6 mm circular plate supported by eight evenly spaced flexural springs. Unlike traditional bias actuated DMs, it uses resonant electrostatic actuation (REA) to realize low- and high-order Zernike modes with a single drive signal. Instead of the hundreds or thousands of electrodes deployed by traditional DMs, the proposed DM employs only 49 electrodes and eliminates the need for spatial control algorithms and associated hardware, thereby providing a compact low-cost alternative. It also exploits dynamic amplification to reduce power requirements and increase the stroke by driving the DM at resonance. The DM was fabricated using a commercial silicon-on-insulator (SOI) MEMS process. Experimental modal analysis was carried out using laser Doppler vibrometry (LDV) to identify mode shapes of the DM and their natural frequencies. We are able to observe all of the lowest eight Zernike modes. |
| first_indexed | 2024-03-09T04:52:12Z |
| format | Article |
| id | doaj.art-a174aceab5524849b15a958369913d6f |
| institution | Directory Open Access Journal |
| issn | 2076-0825 |
| language | English |
| last_indexed | 2024-03-09T04:52:12Z |
| publishDate | 2022-08-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Actuators |
| spelling | doaj.art-a174aceab5524849b15a958369913d6f2023-12-03T13:09:20ZengMDPI AGActuators2076-08252022-08-0111822410.3390/act11080224Resonant Adaptive MEMS MirrorAmr Kamel0Samed Kocer1Lyazzat Mukhangaliyeva2Resul Saritas3Ahmet Gulsaran4Alaa Elhady5Mohamed Basha6Parsin Hajireza7Mustafa Yavuz8Eihab Abdel-Rahman9Mechanical and Mechatronics Engineering, University of Waterloo, Waterloo, ON N2L 3G1, CanadaSystems Design Engineering, University of Waterloo, Waterloo, ON N2L 3G1, CanadaSystems Design Engineering, University of Waterloo, Waterloo, ON N2L 3G1, CanadaSystems Design Engineering, University of Waterloo, Waterloo, ON N2L 3G1, CanadaMechanical and Mechatronics Engineering, University of Waterloo, Waterloo, ON N2L 3G1, CanadaSystems Design Engineering, University of Waterloo, Waterloo, ON N2L 3G1, CanadaElectrical and Computer Engineering, University of Waterloo, Waterloo, ON N2L 3G1, CanadaSystems Design Engineering, University of Waterloo, Waterloo, ON N2L 3G1, CanadaMechanical and Mechatronics Engineering, University of Waterloo, Waterloo, ON N2L 3G1, CanadaSystems Design Engineering, University of Waterloo, Waterloo, ON N2L 3G1, CanadaA novel MEMS continuous deformable mirror (DM) is presented. The mirror can be integrated into optical systems to compensate for monochromatic and chromatic aberrations. It is comprised of a 1.6 mm circular plate supported by eight evenly spaced flexural springs. Unlike traditional bias actuated DMs, it uses resonant electrostatic actuation (REA) to realize low- and high-order Zernike modes with a single drive signal. Instead of the hundreds or thousands of electrodes deployed by traditional DMs, the proposed DM employs only 49 electrodes and eliminates the need for spatial control algorithms and associated hardware, thereby providing a compact low-cost alternative. It also exploits dynamic amplification to reduce power requirements and increase the stroke by driving the DM at resonance. The DM was fabricated using a commercial silicon-on-insulator (SOI) MEMS process. Experimental modal analysis was carried out using laser Doppler vibrometry (LDV) to identify mode shapes of the DM and their natural frequencies. We are able to observe all of the lowest eight Zernike modes.https://www.mdpi.com/2076-0825/11/8/224deformable mirrorsresonant electrostatic actuationwavefront aberrationZernike modes |
| spellingShingle | Amr Kamel Samed Kocer Lyazzat Mukhangaliyeva Resul Saritas Ahmet Gulsaran Alaa Elhady Mohamed Basha Parsin Hajireza Mustafa Yavuz Eihab Abdel-Rahman Resonant Adaptive MEMS Mirror Actuators deformable mirrors resonant electrostatic actuation wavefront aberration Zernike modes |
| title | Resonant Adaptive MEMS Mirror |
| title_full | Resonant Adaptive MEMS Mirror |
| title_fullStr | Resonant Adaptive MEMS Mirror |
| title_full_unstemmed | Resonant Adaptive MEMS Mirror |
| title_short | Resonant Adaptive MEMS Mirror |
| title_sort | resonant adaptive mems mirror |
| topic | deformable mirrors resonant electrostatic actuation wavefront aberration Zernike modes |
| url | https://www.mdpi.com/2076-0825/11/8/224 |
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