Resonant Adaptive MEMS Mirror

Resonant Adaptive MEMS Mirror

A novel MEMS continuous deformable mirror (DM) is presented. The mirror can be integrated into optical systems to compensate for monochromatic and chromatic aberrations. It is comprised of a 1.6 mm circular plate supported by eight evenly spaced flexural springs. Unlike traditional bias actuated DMs...

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Bibliographic Details
Main Authors:	Amr Kamel, Samed Kocer, Lyazzat Mukhangaliyeva, Resul Saritas, Ahmet Gulsaran, Alaa Elhady, Mohamed Basha, Parsin Hajireza, Mustafa Yavuz, Eihab Abdel-Rahman
Format:	Article
Language:	English
Published:	MDPI AG 2022-08-01
Series:	Actuators
Subjects:	deformable mirrors resonant electrostatic actuation wavefront aberration Zernike modes
Online Access:	https://www.mdpi.com/2076-0825/11/8/224

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