The Target Material Influence on the Current Pulse during High Power Pulsed Magnetron Sputtering
The current-time characteristic during high power pulsed magnetron sputtering is measured under identical conditions for seventeen different target materials. Based on physical processes such as gas rarefaction, ion-induced electron emission, and electron impact ionization, two test parameters were...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Frontiers Media S.A.
2017-10-01
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| Series: | Frontiers in Physics |
| Subjects: | |
| Online Access: | http://journal.frontiersin.org/article/10.3389/fphy.2017.00051/full |