Effects of Al doping on dislocation inclinations and strain of GaN films on Si substrates
We present how the interaction between Al dopants and threading dislocations affects dislocation inclinations and then plays an important role in controlling residual strain in GaN-on-Si epitaxial films. When the Al concentration in the GaN epitaxial film is increased to 0.85%, the dislocations exte...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2023-02-01
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Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/5.0126796 |