A High-Voltage-Isolated MEMS Quad–Solenoid Transformer with Specific Insulation Barriers for Miniaturized Galvanically Isolated Power Applications

A High-Voltage-Isolated MEMS Quad–Solenoid Transformer with Specific Insulation Barriers for Miniaturized Galvanically Isolated Power Applications

The paper reports on high voltage (HV)-isolated MEMS quad–solenoid transformers for compact isolated gate drivers and bias power supplies. The component is wafer-level fabricated via a novel MEMS micro-casting technique, where the tightly coupled quad–solenoid chip consists of monolithically integra...

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Bibliographic Details
Main Authors: Changnan Chen, Pichao Pan, Jiebin Gu, Xinxin Li
Format: Article
Language:English
Published: MDPI AG 2024-01-01
Series:Micromachines
Subjects:
micro-transformer
galvanic isolation
electromagnetic coupling
MEMS micro-casting technique
monolithic integration
power supply on chip
Online Access:https://www.mdpi.com/2072-666X/15/2/228

Internet

https://www.mdpi.com/2072-666X/15/2/228

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