Conductive BaCuTeF thin films for transparent contacts for semiconductor electronics
Сhemical composition, structural and electrical properties of the BaCuTeF thin films were investigated. Dependence of the copper excess on the deposition parameters was studied. Excess of copper improves the electrical properties of the films by means of increasing the hole mobility. BaCuTeF thin fi...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Politehperiodika
2008-12-01
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| Series: | Tekhnologiya i Konstruirovanie v Elektronnoi Apparature |
| Subjects: | |
| Online Access: | http://www.tkea.com.ua/tkea/2008/6_2008/pdf/12.zip |