Tungsten oxide thin films for highly sensitive triethylamine detection

Tungsten oxide thin films for highly sensitive triethylamine detection

Metal oxide semiconductor (MOS) thin films are promising sensing layer for integration in gas sensor devices for detecting toxic and harmful molecules. Herein, tungsten oxide (WO3) thin films are deposited on interdigital electrodes by vacuum thermal evaporation to realize batch fabrication of high-...

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Bibliographic Details
Main Authors: Guanglu Lei, Zishuo Li, Guocai Lu, Jinyuan Hu, Haochuan Shang, Xiaolei Zhang, Xianghong Liu, Jun Zhang, Xiangxin Guo
Format: Article
Language:English
Published: Elsevier 2022-03-01
Series:Journal of Materiomics
Subjects:
Thin film
Tungsten oxide
Thermal evaporation
Oxygen vacancy
Gas sensor
Online Access:http://www.sciencedirect.com/science/article/pii/S2352847821001180

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http://www.sciencedirect.com/science/article/pii/S2352847821001180

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