Bandwidth expansion of a pressure control system for pneumatic anti-vibration apparatuses in presence of dead time
This paper considers the pressure control of air springs used for a pneumatic anti-vibration apparatus (AVA), which isolates vibration transmitted to semiconductor lithography equipment. In the control of the pneumatic AVA, pressure feedback is often employed so as to keep the inner pressure of air...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2015-07-01
|
| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/9/3/9_2015jamdsm0031/_pdf/-char/en |