A piezoelectric stick–slip drive nanopositioner with large velocity under high load
Piezoelectric stick–slip drive nanopositioners are of central importance in in situ SEM nanorobotic systems due to their high precise positioning, large stroke, high speed, and compact structure. However, the output velocity under high load will be seriously influenced. In this paper, a new piezoele...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2020-10-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0014391 |