Correction method for dynamic measurement with an optical lever AFM (Effects of ambient fluid and surface force)
Cantilever vibration in an optical lever AFM is theoretically analyzed considering the effect of surface force and ambient fluid. The surface force between the tip and the sample is modeled using a cantilever with a spring and damping added to the tip, and the effect of ambient fluid on the cantilev...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2023-08-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/17/4/17_2023jamdsm0051/_pdf/-char/en |