Fabrication and characterization of highly responsive hydrogen sensor based on Fe2O3:ZnO nanostructured thin film
This work aimed to manufacture a highly sensitive hydrogen gas sensor based on Fe2O3:ZnO thin film. The Fe2O3:ZnO based sputtering target was synthesized by a solid-state synthesis method. Gas-sensitive thin films were deposited onto the alumina substrate by the high-frequency (RF) magnetron sputter...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2024-02-01
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| Series: | Measurement: Sensors |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2665917423003203 |