Fabrication and characterization of highly responsive hydrogen sensor based on Fe2O3:ZnO nanostructured thin film

This work aimed to manufacture a highly sensitive hydrogen gas sensor based on Fe2O3:ZnO thin film. The Fe2O3:ZnO based sputtering target was synthesized by a solid-state synthesis method. Gas-sensitive thin films were deposited onto the alumina substrate by the high-frequency (RF) magnetron sputter...

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Hlavní autoři: Mikayel Aleksanyan, Artak Sayunts, Gevorg Shahkhatuni, Zarine Simonyan, Gohar Shahnazaryan, Vladimir Aroutiounian
Médium: Článek
Jazyk:English
Vydáno: Elsevier 2024-02-01
Edice:Measurement: Sensors
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On-line přístup:http://www.sciencedirect.com/science/article/pii/S2665917423003203

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