MEMS Electrostatically Driven Coupled Beam Filter Banks
MEMS bandpass filters based on electrostatically driven, mechanically coupled beams with in-plane motion have been demonstrated up to the VHF band. Filters higher than second order with parallel plate drives have inherent tuning difficulties, which may be resolved by adding mass-loaded beams to the...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-12-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/14/12/2214 |